Nanometer Displacement Measurement System | 711
Toyo Seiki · Others
This is a new optical interferometry system that is not limited by the accuracy of the optical elements or the object being measured, based on the fact that the statistics of the scattering field (laser speckle) generated when a rough surface object is irradiated by a laser is completely random in a statistical sense.
Specification
| Model | NS-1 |
|---|---|
| Laser | Wavelength: 660nm / Maximum output: 90mW / Class 3B equivalent |
| Laser beam diameter | Approx. 1.0mm |
| Laser beam interval | Approx. 3.0mm |
| Measurement accuracy | ±1.0nm |
| Measurement range | 0 to 3mm |
| PC & software | Provided as standard accessories |
| Frame rate | 2fps |
| Power supply | Single-phase, AC100V, 50/60Hz, 5A |
| Dimensions | • W240 × D200 × H280mm (Main unit) / • W390 × D320 × H200mm (Control unit) |
| Weight (approx.) | • 5kg (Main unit) / • 6kg (Control unit) |
